MD3.3 -
Piezoelectric Tuning of a Suspended Nitride Ring Resonator
02:00-02:15
2017-10-02 02:00
2017-10-02 02:15
America/Denver
Piezoelectric Tuning of a Suspended Nitride Ring Resonator
A piezoelectric thin film deposited on a suspended silicon nitride-based waveguide provides tuning via mechanical deformation. The fabricated ring resonator device is capable of tuning across a full FSR with under 16 V applied bias
Hilton Santa Fe Historic Plaza Salon VI
W. Jin
, Department of Electrical and Computer Engineering, University of California, Santa Barbara (UCSB), Santa Barbara, CA, United States,
E. Stanton
, Department of Electrical and Computer Engineering, University of California, Santa Barbara (UCSB), Santa Barbara, CA, United States
. Volet
, 1 Department of Electrical and Computer Engineering, University of California, Santa Barbara (UCSB), Santa Barbara, CA, United States
R. Polcawich
, U.S. Army Research Laboratory, Adelphi, MD, United States
P. Morton
, Morton Photonics, West Friendship, MB, United States
. Bowers
, Department of Electrical and Computer Engineering, University of California, Santa Barbara (UCSB), Santa Barbara, CA, United States
D. Baney
, Keysight Laboratories, Keysight Technologies, Santa Clara, CA, United States
A piezoelectric thin film deposited on a suspended silicon nitride-based waveguide provides tuning via mechanical deformation. The fabricated ring resonator device is capable of tuning across a full FSR with under 16 V applied bias